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Mapping of dopants in silicon by injection of electrons
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SYSNO 0367280 Title Mapping of dopants in silicon by injection of electrons Author(s) Hovorka, Miloš (UPT-D)
Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Frank, Luděk (UPT-D) RID, SAI, ORCID
Mikulík, P. (CZ)Source Title MC 2011 - Microscopy Conference Kiel. IM7.P198:1-2. - Kiel : DGE, 2011 Conference MC 2011 - Microscopy Conference, Kiel, 28.08.2011-02.09.2011 Document Type Konferenční příspěvek (zahraniční konf.) Grant IAA100650902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GAP108/11/2270 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z20650511 - UPT-D (2005-2011) Language eng Country DE Keywords dopant * silicon * scanning electron microscopy Permanent Link http://hdl.handle.net/11104/0202020
Number of the records: 1