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A study of the ion flux during deposition of titanium thin films by hollow cathode plasma jet
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SYSNO 0333649 Title A study of the ion flux during deposition of titanium thin films by hollow cathode plasma jet Title Studium iontového toku během depozice tenkých vrstev titanu pomocí plazmové trysky s efektem duté katody Author(s) Virostko, Petr (FZU-D)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Čada, Martin (FZU-D) RID, ORCID, SAI
Kment, Štěpán (FZU-D) RID, ORCID
Jastrabík, Lubomír (FZU-D) RID, ORCID
Tichý, M. (CZ)Source Title Journal of Plasma and Fusion Research SERIES. Roč. 8, - (2009), 719-723 Conference Proceedings of the 14th International Congress on Plasma Physics (ICPP2008), Fukuoka, 08.09.2008-12.09.2008 Document Type Článek v odborném periodiku Grant KJB100100707 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) KJB100100805 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) 1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic CEZ AV0Z10100522 - FZU-D (2005-2011) Language eng Country JP Keywords ion flux * plasma jet * hollow cathode * plasma diagnostics URL http://www.jspf.or.jp/JPFRS/PDF/Vol8/jpfrs2009_08-0719.pdf Permanent Link http://hdl.handle.net/11104/0178588
Number of the records: 1