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A study of the ion flux during deposition of titanium thin films by hollow cathode plasma jet
- 1.VIROSTKO, Petr, HUBIČKA, Zdeněk, ČADA, Martin, KMENT, Štěpán, JASTRABÍK, Lubomír, TICHÝ, M. A study of the ion flux during deposition of titanium thin films by hollow cathode plasma jet. Journal of Plasma and Fusion Research SERIES. 2009, 8(-), 719-723. ISSN 1883-9630. Available: http://www.jspf.or.jp/JPFRS/PDF/Vol8/jpfrs2009_08-0719.pdf
Number of the records: 1