Number of the records: 1
Deposition of SiC thin films using pulsed sputtering of a hollow cathode
- 1.Soukup, R. J. - Ianno, N.J. - Huguenin-Love, J.L. - Lauer, N.T. - Hubička, Zdeněk
Deposition of SiC thin films using pulsed sputtering of a hollow cathode.
Journal of Materials Science and Engineering. Roč. 3, č. 8 (2009), s. 1-4. ISSN 1934-8959
http://hdl.handle.net/11104/0176779
Number of the records: 1