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Deposition of SiC thin films using pulsed sputtering of a hollow cathode
- 1.SOUKUP, R. J., IANNO, N.J., HUGUENIN-LOVE, J.L., LAUER, N.T., HUBIČKA, Zdeněk. Deposition of SiC thin films using pulsed sputtering of a hollow cathode. Journal of Materials Science and Engineering. 2009, 3(8), 1-4. ISSN 1934-8959.
Number of the records: 1