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Electric probe diagnostics of the hollow cathode plasma jet system for TiO.sub.x./sub. thin films deposition
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SYSNO ASEP 0324107 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Electric probe diagnostics of the hollow cathode plasma jet system for TiOx thin films deposition Title Sondové diagnostiky plazmatického tryskového systému s dutou katodou pro depozice tenkých vrstev TiOx. Author(s) Virostko, Petr (FZU-D)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Kment, Štěpán (FZU-D) RID, ORCID
Adámek, Petr (FZU-D) RID, ORCID
Jastrabík, Lubomír (FZU-D) RID, ORCID
Tichý, M. (CZ)Source Title International conference on phenomena in ionized gases- ICPIG /28./. - Praha : Institute of Plasma Physics AS CR, 2007 / Schmidt J. ; Šimek M. ; Pekárek S. ; Prukner V. - ISBN 978-80-87026-01-4 Pages s. 783-786 Number of pages 4 s. Action International conference on phenomena in ionized gases - ICPIG /28./ Event date 15.07.2007-20.07.2007 VEvent location Praha Country CZ - Czech Republic Event type EUR Language eng - English Country CZ - Czech Republic Keywords probe diagnostics ; Langmuir probe ; hollow cathode ; plasma jet Subject RIV BL - Plasma and Gas Discharge Physics R&D Projects KAN400720701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GA202/06/0776 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10100522 - FZU-D (2005-2011) Annotation Electric probe diagnostics were used to determine plasma parameters of the low pressure low temperature hollow cathode plasma jet system used for TiOx thin films depositions. Lagmuir probe measurements provided electron energy probability function, electron density, and effective electron temperature in the plasma jet for different working conditions. They were compared with measurements of the positive ion current to the negatively biased substrate. The substrate was biased with pulsed DC or RF voltage. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2009
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