Number of the records: 1
Electric probe diagnostics of the hollow cathode plasma jet system for TiO.sub.x./sub. thin films deposition
- 1.Virostko, Petr - Hubička, Zdeněk - Kment, Štěpán - Adámek, Petr - Jastrabík, Lubomír - Tichý, M.
Electric probe diagnostics of the hollow cathode plasma jet system for TiOx thin films deposition.
International conference on phenomena in ionized gases- ICPIG /28./. Praha: Institute of Plasma Physics AS CR, 2007 - (Schmidt, J.; Šimek, M.; Pekárek, S.; Prukner, V.), s. 783-786. ISBN 978-80-87026-01-4.
[International conference on phenomena in ionized gases - ICPIG /28./. Praha (CZ), 15.07.2007-20.07.2007]
http://hdl.handle.net/11104/0171892
Number of the records: 1