Electric probe diagnostics of the hollow cathode plasma jet system for TiO.sub.x./sub. thin films deposition

Virostko, P., Hubička, Z., Kment, Š., Adámek, P., Jastrabík, L., Tichý, M. Electric probe diagnostics of the hollow cathode plasma jet system for TiO_x thin films deposition. In: SCHMIDT, J., ŠIMEK, M., PEKÁREK, S., PRUKNER, V., eds. International conference on phenomena in ionized gases- ICPIG /28./. Praha: Institute of Plasma Physics AS CR, 2007, s. 783-786. ISBN 978-80-87026-01-4.