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Electric probe diagnostics of the hollow cathode plasma jet system for TiO.sub.x./sub. thin films deposition
- 1.VIROSTKO, Petr, HUBIČKA, Zdeněk, KMENT, Štěpán, ADÁMEK, Petr, JASTRABÍK, Lubomír, TICHÝ, M. Electric probe diagnostics of the hollow cathode plasma jet system for TiOx thin films deposition. In: SCHMIDT, J., ŠIMEK, M., PEKÁREK, S., PRUKNER, V., eds. International conference on phenomena in ionized gases- ICPIG /28./. Praha: Institute of Plasma Physics AS CR, 2007, s. 783-786. ISBN 978-80-87026-01-4.
Number of the records: 1