Two-dimensional dopant profiling with low energy SEM

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SYSNO	0308202
Title	Two-dimensional dopant profiling with low energy SEM
Title	Tvorba dvourozměrných profilů dopantu s níkoenergiovým SEM
Author(s)	Mika, Filip (UPT-D)_{RID, SAI, ORCID} Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Source Title	Journal of Microscopy. Roč. 230, č. 1 (2008), s. 76-83. - : Wiley
Document Type	Článek v odborném periodiku
Grant	GA102/05/2327 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Language	eng
Country	GB
Keywords	dopant contrast * low energy SEM * semiconductors
Permanent Link	http://hdl.handle.net/11104/0160756

Number of the records: 1