Number of the records: 1
Two-dimensional dopant profiling with low energy SEM
- 1.Mika, Filip - Frank, Luděk
Two-dimensional dopant profiling with low energy SEM.
Journal of Microscopy. Roč. 230, č. 1 (2008), s. 76-83. ISSN 0022-2720. E-ISSN 1365-2818
Impact factor: 1.409, year: 2008
http://hdl.handle.net/11104/0160756
Number of the records: 1