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New Multichannel Electron Energy Analyzer with Cylindrically Symmetrical Electrostatic Field
- 1.0205639 - UPT-D 20030021 RIV US eng J - Journal Article
Čižmár, Petr - Müllerová, Ilona
New Multichannel Electron Energy Analyzer with Cylindrically Symmetrical Electrostatic Field.
Microscopy and Microanalysis. Roč. 9, Sup. 3 (2003), s. 18 - 19. ISSN 1431-9276. E-ISSN 1435-8115.
[MC 2003. Dresden, 07.09.2003-12.09.2003]
R&D Projects: GA AV ČR IAA1065304
Institutional research plan: CEZ:AV0Z2065902
Keywords : Auger spectroscopy * surface examination * scanning electron microscope
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 1.648, year: 2003
Auger electron and photoelectron spectroscopies are important methods for surface examination. The useful signal is low, so the time of measurement is critical, particularly in spectro-microscopic applications and with rad iation sensitive specimens. Hence, the parallel acquisition of energy spectra with a multichannel analyzer is highly desirable. One successful solution is the hyperbolic field analyzer [1]. Further improvement can be achieved by incorporating the cylindrical symmetry [2] (see FIG 1). In this case the input pupil is imaged into a series of point images.
Permanent Link: http://hdl.handle.net/11104/0101252
Number of the records: 1