Electrostatic mini SLEEM for surface studies

0205490 - UPT-D 20020040 RIV CZ eng C - Conference Paper (international conference)
Romanovský, Vladimír - El-Gomati, M.
Electrostatic mini SLEEM for surface studies.
Proceedings of the 2nd annual meeting of the Czechoslovak microscopy society. Brno: CSMS, 2002 - (Frank, L.), s. 95 - 96. ISBN 80-238-8749-1.
[CSEM. Vranovská Ves (CZ), 08.02.2002-09.02.2002]
Institutional research plan: CEZ:AV0Z2065902
Keywords : low-energy electrons * charging effect * non-conductive specimens
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Exploitation of the low-energy electrons is advantageous for several reasons. One of them is their smaller penetration depth into the material, which reveals itself as favourable for the surface analysis. Using the low-energy electrons even causes partial, and in some cases total elimination ofcharging effects at non-conductive or slightly conductive specimens. Slowprimary electrons (PE) cause only reduced radiation damage of specimens.
Permanent Link: http://hdl.handle.net/11104/0101103