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Ellipsometric investigations of the refractive index depth profile in PZT thin films

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    0133592 - FZU-D 20010392 RIV DE eng J - Journal Article
    Deineka, Alexander - Jastrabík, Lubomír - Suchaneck, G. - Gerlach, G.
    Ellipsometric investigations of the refractive index depth profile in PZT thin films.
    Physica Status Solidi A. Roč. 188, č. 4 (2001), s. 1549-1552. ISSN 0031-8965
    R&D Projects: GA MŠMT LN00A015; GA ČR GA202/00/1425
    Institutional research plan: CEZ:AV0Z1010914
    Keywords : PZT films * optical investigations
    Subject RIV: BM - Solid Matter Physics ; Magnetism
    Impact factor: 1.025, year: 2001

    Optical investigations of self-polarized PbZr0.235Ti0.765O3 films deposited onto Si/SiO2/adhesion layer/(111) Pt substrate by RF sputtering are presented in this work. Measurements were performed with a spectral ellipsometer working in rotating analyzer mode.
    Permanent Link: http://hdl.handle.net/11104/0031555

     
     

Number of the records: 1  

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