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Detection Strategies for Collection of Secondary Electrons in SEM
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SYSNO ASEP 0092207 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Detection Strategies for Collection of Secondary Electrons in SEM Title Detekční strategie pro sběr sekundárních elektronů v REM Author(s) Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Hovorka, Miloš (UPT-D)
Wandrol, Petr (UPT-D)
Mika, Filip (UPT-D) RID, SAI, ORCID
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDSource Title Proceedings of the 8th Multinational Congress on Microscopy. - Prague : Czechoslovak Microscopy Society, 2007 / Nebesářová Jana ; Hozák Pavel - ISBN 978-80-239-9397-4 Pages s. 91-92 Number of pages 2 s. Action Multinational Congress on Microscopy /8./ Event date 17.06.2007-21.06.2007 VEvent location Prague Country CZ - Czech Republic Event type EUR Language eng - English Country CZ - Czech Republic Keywords detection ; secondary electrons ; SEM Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects GA102/05/2327 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z20650511 - UPT-D (2005-2011) Annotation In the scanning electron microscope (SEM), the secondary electrons (SE) are usually detected by the Everhart-Thornley (ET) type detector, using a weak electrostatic field to attract low energy SE let us call it the standard system. This principle is employed for more than forty years. Modern SEMs achieve their improved image resolution by allowing the strong magnetic field of the objective lens (OL) to penetrate to the specimen surface (so called immersion system). Two SE detectors are usually used in this case: one is below the OL just as the standard ET detector (lower detector) and the other is positioned above the OL (upper detector). The final contrast of SE images for the same specimen varies with the energy and angular sensitivity of the detectors, connected with specific distributions of the electrostatic and magnetic fields in the specimen region. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2008
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