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Dual-wavelength femtosecond laser-induced single-shot damage and ablation of silicon
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SYSNO ASEP 0584941 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Dual-wavelength femtosecond laser-induced single-shot damage and ablation of silicon Author(s) Bulgakov, Alexander (FZU-D) ORCID
Sládek, Juraj (FZU-D) ORCID
Hrabovský, Jan (FZU-D) ORCID
Mirza, M. Inam (FZU-D) ORCID
Marine, Wladimir (FZU-D)
Bulgakova, Nadezhda M. (FZU-D) ORCIDNumber of authors 6 Article number 158626 Source Title Applied Surface Science. - : Elsevier - ISSN 0169-4332
Roč. 643, Jan (2024)Number of pages 15 s. Language eng - English Country NL - Netherlands Keywords dual-wavelength laser ablation ; femtosecond pulses ; laser-induced damage ; laser craters ; silicon ; two-temperature model Subject RIV BH - Optics, Masers, Lasers OECD category Optics (including laser optics and quantum optics) R&D Projects EF15_003/0000445 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support FZU-D - RVO:68378271 UT WOS 001094464900001 EID SCOPUS 85174217168 DOI 10.1016/j.apsusc.2023.158626 Annotation An experimental and theoretical study of laser-induced damage and ablation of silicon by two individual femtosecond pulses of different wavelengths, 1030 and 515 nm, is performed to address the physical mechanisms of dual-wavelength ablation and reveal possibilities for increasing the ablation efficiency. The produced craters and damaged areas are analyzed as a function of laser fluence and time separation between the pulses and are compared with monochromatic irradiation. The order of pulses is demonstrated to be essential in bi-color ablation with higher material removal rates when a shorter-wavelength pulse arrives first at the surface. Simulations based on the two-temperature model show that the visible pulse is profitable for the generation of the electron-hole plasma while the delayed IR pulse is efficiently absorbed in the plasma enhancing energy coupling to the target. At long delays of 30–100 ps, the dual-wavelength ablation is found to be particularly strong with formation of deep smooth craters. This is explained by the expansion of a hot liquid layer produced by the first pulse with a drastic decrease in the surface reflectivity at this timescale. The results provide insight into the processes of dual-wavelength laser ablation offering a better control of the energy deposition into material. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2025
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