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Využití nanotechnologie dvoufotonové litografie

  1. 1.
    SYSNO0584775
    TitleVyužití nanotechnologie dvoufotonové litografie
    Author(s) Matějka, Milan (UPT-D) RID, ORCID, SAI
    Černý, Š. (CZ)
    Source Title IMAPS Flash Conference. 9th International Microelectronics Assembly and Packaging Society Flash Conference. Extended abstracts. S. 14-15. - Brno : Brno University of Technology, FEEC, 2023 / Otáhal A. ; Szendiuch I. ; Skácel J.
    Conference IMAPS Flash Conference 2023. International Microelectronics Assembly and Packaging Society Flash Conference /9./, 26.10.2023 - 27.10.2023, Brno
    Document TypeAbstrakt
    Institutional supportUPT-D - RVO:68081731
    Languagecze
    CountryCZ
    Permanent Linkhttps://hdl.handle.net/11104/0352623
     
Number of the records: 1  

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