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Effects of monoatomic and cluster bombardment with Ar ion beam on the surface of hydrogenated nanocrystalline diamond
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SYSNO ASEP 0574374 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Effects of monoatomic and cluster bombardment with Ar ion beam on the surface of hydrogenated nanocrystalline diamond Author(s) Romanyuk, Olexandr (FZU-D) RID, ORCID
Zemek, Josef (FZU-D) RID, ORCID
Houdková, Jana (FZU-D) RID, ORCID
Babčenko, Oleg (FZU-D) ORCID
Shagieva, Ekaterina (FZU-D) ORCID
Beranová, Klára (FZU-D) ORCID
Kromka, Alexander (FZU-D) RID, ORCID, SAI
Jiříček, Petr (FZU-D) RID, ORCID, SAINumber of authors 8 Article number 109748 Source Title Diamond and Related Materials. - : Elsevier - ISSN 0925-9635
Roč. 133, March (2023)Number of pages 9 s. Language eng - English Country NL - Netherlands Keywords nanocrystalline diamond ; hydrogen ; Ar ions ; amorphization ; XPS ; Raman spectroscopy ; EPES ; REELS Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) R&D Projects LUASK22147 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Open access with time embargo (01.03.2025) Institutional support FZU-D - RVO:68378271 UT WOS 000964581200001 EID SCOPUS 85147603903 DOI 10.1016/j.diamond.2023.109748 Annotation In the paper, we prepared a hydrogenated nanocrystalline diamond (NCD-H) film by the chemical vapor deposition (CVD) method. A variable degree of NCD-H surface destruction and surface graphitization was achieved by Ar ion bombardment using monoatomic beam (Ar+) and cluster ion beam (ArCIB). Bombardment with ArCIB manifests itself by the formation of a very thin altered layer on the surface of NCD-H accompanied by no Ar atoms embedded in the surface region. In contrast, bombardment with Ar+ beam leads to the creation of thicker, homogeneous altered layer characterized by dominating C sp2 hybridization, by the embedded Ar atoms, and by the reduced dimensions of diamond grains located near the surface of the samples. Furthermore, we evaluate the contribution of the C-Hx bonds to the asymmetry of the C 1s core level line shape and to measure the H concentration on the surface.
Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2024 Electronic address https://doi.org/10.1016/j.diamond.2023.109748
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