Number of the records: 1
Comparison of PMMA shrinkage in ion beam lithography: PMMA on glass substrate vs free-standing PMMA film
- 1.Romanenko, Oleksandr V. - Lavrentiev, Vasyl - Borodkin, Andrei - Havránek, Vladimír - Macková, Anna
Comparison of PMMA shrinkage in ion beam lithography: PMMA on glass substrate vs free-standing PMMA film.
Nuclear Instruments & Methods in Physics Research Section B. Roč. 538, MAY (2023), s. 123-130. ISSN 0168-583X. E-ISSN 1872-9584
OECD category: Nuclear physics
Impact factor: 1.3, year: 2022
Method of publishing: Limited access
https://doi.org/10.1016/j.nimb.2023.02.001
https://hdl.handle.net/11104/0344381
Number of the records: 1