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Graphene Oxide and Polymer Humidity Micro-Sensors Prepared by Carbon Beam Writing
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SYSNO ASEP 0570625 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Graphene Oxide and Polymer Humidity Micro-Sensors Prepared by Carbon Beam Writing Author(s) Malinský, Petr (UJF-V) RID, ORCID, SAI
Romanenko, Oleksandr V. (UJF-V) ORCID, SAI
Havránek, Vladimír (UJF-V) RID, SAI, ORCID
Cutroneo, Mariapompea (UJF-V) ORCID, RID, SAI
Novák, Josef (UJF-V) ORCID
Štěpanovská, Eva (UJF-V) ORCID
Mikšová, Romana (UJF-V) RID, ORCID, SAI
Marvan, P. (CZ)
Mazánek, V. (CZ)
Sofer, Z. (CZ)
Macková, Anna (UJF-V) RID, ORCID, SAINumber of authors 11 Article number 1066 Source Title Polymers. - : MDPI
Roč. 15, č. 5 (2023)Number of pages 17 s. Publication form Online - E Language eng - English Country CH - Switzerland Keywords carbon ion micro-beam writting ; graphene oxide ; humidity sensors ; polymers OECD category Polymer science R&D Projects EF16_013/0001812 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA22-10536S GA ČR - Czech Science Foundation (CSF) Method of publishing Open access Institutional support UJF-V - RVO:61389005 UT WOS 000947426800001 EID SCOPUS 85149790433 DOI 10.3390/polym15051066 Annotation In this study, novel flexible micro-scale humidity sensors were directly fabricated in graphene oxide (GO) and polyimide (PI) using ion beam writing without any further modifications, and then successfully tested in an atmospheric chamber. Two low fluences (3.75 x 10(14) cm(-2) and 5.625 x 10(14) cm(-2)) of carbon ions with an energy of 5 MeV were used, and structural changes in the irradiated materials were expected. The shape and structure of prepared micro-sensors were studied using scanning electron microscopy (SEM). The structural and compositional changes in the irradiated area were characterized using micro-Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), Rutherford back-scattering spectroscopy (RBS), energy-dispersive X-ray spectroscopy (EDS), and elastic recoil detection analysis (ERDA) spectroscopy. The sensing performance was tested at a relative humidity (RH) ranging from 5% to 60%, where the electrical conductivity of PI varied by three orders of magnitude, and the electrical capacitance of GO varied in the order of pico-farads. In addition, the PI sensor has proven long-term sensing stability in air. We demonstrated a novel method of ion micro-beam writing to prepare flexible micro-sensors that function over a wide range of humidity and have good sensitivity and great potential for widespread applications. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2024 Electronic address https://doi.org/10.3390/polym15051066
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