Number of the records: 1
Smart Design of Cz-Ge Crystal Growth Furnace and Process
- 1.
SYSNO ASEP 0567441 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Smart Design of Cz-Ge Crystal Growth Furnace and Process Author(s) Dropka, N. (DE)
Tang, X. (DE)
Chappa, G. K. (DE)
Holeňa, Martin (UIVT-O) SAI, RIDArticle number 1764 Source Title Crystals. - : MDPI - ISSN 2073-4352
Roč. 12, č. 12 (2022)Number of pages 17 s. Publication form Online - E Language eng - English Country CH - Switzerland Keywords Czochralski Ge growth ; CFD training data ; furnace design ; process design ; regression tree ; correlation coefficient OECD category Computer sciences, information science, bioinformathics (hardware development to be 2.2, social aspect to be 5.8) Method of publishing Open access Institutional support UIVT-O - RVO:67985807 UT WOS 000900625400001 EID SCOPUS 85144718366 DOI 10.3390/cryst12121764 Annotation The aim of this study was to evaluate the potential of the machine learning technique of decision trees to understand the relationships among furnace design, process parameters, crystal quality, and yield in the case of the Czochralski growth of germanium. The ultimate goal was to provide the range of optimal values of 13 input parameters and the ranking of their importance in relation to their impact on three output parameters relevant to process economy and crystal quality. Training data were provided by CFD modelling. The variety of data was ensured by the Design of Experiments method. The results showed that the process parameters, particularly the pulling rate, had a substantially greater impact on the crystal quality and yield than the design parameters of the furnace hot zone. Of the latter, only the crucible size, the axial position of the side heater, and the material properties of the radiation shield were relevant. Workplace Institute of Computer Science Contact Tereza Šírová, sirova@cs.cas.cz, Tel.: 266 053 800 Year of Publishing 2023 Electronic address https://dx.doi.org/10.3390/cryst12121764
Number of the records: 1