Number of the records: 1
Patterning of conductive nano-layers on garnet
- 1.0543745 - ÚPT 2022 RIV CZ eng C - Conference Paper (international conference)
Chlumská, Jana - Lalinský, Ondřej - Matějka, Milan - Krátký, Stanislav - Kolařík, Vladimír
Patterning of conductive nano-layers on garnet.
NANOCON 2020. 12th International Conference on Nanomaterials - Research & Application. Conference proceedings. Ostrava: TANGER, 2021, (2021), s. 221-224. ISBN 978-80-87294-98-7. ISSN 2694-930X.
[International Conference NANOCON 2020 /12./. Brno (CZ), 21.10.2020-23.10.2020]
R&D Projects: GA TA ČR(CZ) TN01000008
Institutional support: RVO:68081731
Keywords : Electron beam lithography * nano-patterning * yttrium aluminium garnet
OECD category: Nano-processes (applications on nano-scale)
https://www.confer.cz/nanocon/2020/3731-patterning-of-conductive-nano-layer-on-garnet
Permanent Link: http://hdl.handle.net/11104/0320902
Number of the records: 1