Number of the records: 1
Horizons in World Physics
- 1.0517476 - FZÚ 2020 RIV US eng M - Monography Chapter
Pokorný, Petr - Novotný, Michal
Radicals and ions in magnetron sputtering discharges in noble gases.
Horizons in World Physics. New York: Nova Science Publishers Inc, 2019 - (Reimer, A.), s. 56-116. 297. ISBN 978-1-53614-712-4
R&D Projects: GA MŠMT(CZ) LO1409; GA ČR GA16-22092S; GA ČR GA18-17834S; GA ČR GA18-09347S
Institutional support: RVO:68378271
Keywords : magnetron sputtering * noble gases * discharge * radicals * ions * contamination * mass spectrometry
OECD category: Fluids and plasma physics (including surface physics)
https://novapublishers.com/shop/horizons-in-world-physics-volume-297/
The chapter deals with mass spectrometric characterization of atoms, radicals and ions in magnetron sputtering discharges generated in Ne, Ar, Kr and Xe gases. In these discharges, different kinds of species such as gas and metal atoms, radicals, negative and positive ions according to the magnetron target and the kind of sputtering gas used are generated. The amount of individual species and ion energy distribution functions as a function of the sputtering gas pressure and the magnetron power are investigated in detail.
Permanent Link: http://hdl.handle.net/11104/0302782
Number of the records: 1