Number of the records: 1
Thermal desorption spectroscopy in prototype furnace for chemical vapor deposition
- 1.
SYSNO 0494371 Title Thermal desorption spectroscopy in prototype furnace for chemical vapor deposition Author(s) Průcha, Lukáš (UPT-D) ORCID
Daniel, Benjamin (UPT-D) RID
Piňos, Jakub (UPT-D) RID, ORCID, SAI
Mikmeková, Eliška (UPT-D) RIDCorespondence/senior Průcha, Lukáš - Korespondující autor Source Title Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar. S. 60-61. - Brno : Institute of Scientific Instruments The Czech Academy of Sciences, 2018 Conference Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, 04.06.2018 - 08.06.2018, Skalský dvůr Document Type Konferenční příspěvek (zahraniční konf.) Grant TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR), CZ - Czech Republic LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 Language eng Country CZ Keywords thermal desorption spectroscopy * CVD * surface cleaning * silicon Permanent Link http://hdl.handle.net/11104/0287627
Number of the records: 1