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Thermal desorption spectroscopy in prototype furnace for chemical vapor deposition
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SYSNO ASEP 0494371 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Thermal desorption spectroscopy in prototype furnace for chemical vapor deposition Author(s) Průcha, Lukáš (UPT-D) ORCID
Daniel, Benjamin (UPT-D) RID
Piňos, Jakub (UPT-D) RID, ORCID, SAI
Mikmeková, Eliška (UPT-D) RIDNumber of authors 4 Source Title Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar. - Brno : Institute of Scientific Instruments The Czech Academy of Sciences, 2018 - ISBN 978-80-87441-23-7 Pages s. 60-61 Number of pages 2 s. Publication form Print - P Action Recent Trends in Charged Particle Optics and Surface Physics Instrumentation Event date 04.06.2018 - 08.06.2018 VEvent location Skalský dvůr Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords thermal desorption spectroscopy ; CVD ; surface cleaning ; silicon Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Electrical and electronic engineering R&D Projects TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 UT WOS 000450591400022 Annotation Cleaning of the sample surfaces is crucial for scanning electron microscopy, especially for
low energy electron microscopy or for the deposition of thin layers, such as graphene,
where surface has to be well prepared. In the best case, every unwanted particle should be
cleaned from the sample surface for best low energy electron microscopy observation or thin
film deposition. Unfortunately, the standard cleaning procedures can leave residues on the
sample surface. This work is focused on thermal desorption spectroscopy (TDS). TDS is a method of observing desorbed molecules from a sample surface during the increase of
temperature of the sample. The aim of this study was to determine optimum conditions:
temperature and time, to achieve clean surfaces in the shortest time.Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2019
Number of the records: 1