Number of the records: 1  

Thermal desorption spectroscopy in prototype furnace for chemical vapor deposition

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    $a 000450591400022 $2 WOS
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    $2 DOI
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    $a 20181011d m y slo 03 ba
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    $a eng $d eng
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    $a CZ
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    $a Thermal desorption spectroscopy in prototype furnace for chemical vapor deposition
    215
      
    $a 2 s. $c P
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    $1 001 cav_un_epca*0494358 $1 010 $a 978-80-87441-23-7 $1 200 1 $a Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar $v S. 60-61 $1 210 $a Brno $c Institute of Scientific Instruments The Czech Academy of Sciences $d 2018
    610
      
    $a thermal desorption spectroscopy
    610
      
    $a CVD
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    $a surface cleaning
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    $a silicon
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    $3 cav_un_auth*0365384 $a Průcha $b Lukáš $i D1: Elektronová mikroskopie $j D1: Electron Microscopy $p UPT-D $w Electron Microscopy $z K $T Ústav přístrojové techniky AV ČR, v. v. i.
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    $3 cav_un_auth*0324291 $a Daniel $b Benjamin $i D1: Elektronová mikroskopie $j D1: Electron Microscopy $p UPT-D $w Electron Microscopy $y GB $T Ústav přístrojové techniky AV ČR, v. v. i.
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    $3 cav_un_auth*0308850 $a Piňos $b Jakub $i D1: Elektronová mikroskopie $j D1: Electron Microscopy $p UPT-D $w Electron Microscopy $T Ústav přístrojové techniky AV ČR, v. v. i.
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    $3 cav_un_auth*0258032 $a Mikmeková $b Eliška $i D1: Elektronová mikroskopie $j D1: Electron Microscopy $p UPT-D $w Electron Microscopy $T Ústav přístrojové techniky AV ČR, v. v. i.
Number of the records: 1  

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