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Diamond-like carbon prepared by pulsed laser deposition with ion bombardment: physical properties
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SYSNO ASEP 0490103 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Diamond-like carbon prepared by pulsed laser deposition with ion bombardment: physical properties Author(s) Písařík, Petr (FZU-D) RID, ORCID
Mikšovský, Jan (FZU-D) RID, ORCID
Remsa, Jan (FZU-D) RID, ORCID
Zemek, Josef (FZU-D) RID, ORCID
Tolde, Z. (CZ)
Jelínek, Miroslav (FZU-D) RID, ORCIDNumber of authors 6 Article number 85 Source Title Applied Physics A - Materials Science & Processing. - : Springer - ISSN 0947-8396
Roč. 124, č. 1 (2018), s. 1-9Number of pages 9 s. Language eng - English Country DE - Germany Keywords diamond-like carbon ; thin layers ; PLD ; ion bombardment Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) R&D Projects LO1409 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA15-05864S GA ČR - Czech Science Foundation (CSF) Method of publishing Limited access Institutional support FZU-D - RVO:68378271 UT WOS 000419725800085 EID SCOPUS 85040227086 DOI 10.1007/s00339-017-1501-5 Annotation Diamond-like carbon (DLC) and titanium-doped DLC thin films were prepared by unique hybrid system consisting of pulsed laser deposition, ion source (bombardment) and magnetron sputtering. The influence of deposition parameters (ion energies, deposition pressures and magnetron power) on composition and physical properties was studied. Composition and sp(3)/sp(2) ratio were determined by XPS. sp(3)/sp(2) ratio was in the range from 1.4 to 2.2 for undoped DLC and from 3.4 to 4.8 for Ti-DLC. AFM showed that the layers were smooth, but with small amounts of random droplets. The measurements of the contact angle and determination of surface free energy were made for water, diiodomethane and ethylene glycol. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2019 Electronic address https://doi.org/10.1007/s00339-017-1501-5
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