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System for time-resolved laser absorption spectroscopy and its application to high-power impulse magnetron sputtering
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SYSNO ASEP 0473840 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title System for time-resolved laser absorption spectroscopy and its application to high-power impulse magnetron sputtering Author(s) Adámek, Petr (FZU-D) RID, ORCID
Olejníček, Jiří (FZU-D) RID, ORCID
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Čada, Martin (FZU-D) RID, ORCID, SAI
Kment, Štěpán (FZU-D) RID, ORCID
Kohout, Michal (FZU-D) RID, ORCID
Do, H.T. (VN)Number of authors 7 Article number 023105 Source Title Review of Scientific Instruments. - : AIP Publishing - ISSN 0034-6748
Roč. 88, č. 2 (2017), s. 1-8Number of pages 8 s. Language eng - English Country US - United States Keywords plasma diagnostics ; HiPIMS ; time resolved measurement ; laser absorption spectroscopy Subject RIV BL - Plasma and Gas Discharge Physics OECD category Fluids and plasma physics (including surface physics) R&D Projects TF01000084 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) GA15-00863S GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 UT WOS 000395902700005 EID SCOPUS 85012005007 DOI 10.1063/1.4975175 Annotation This paper deals with the development and construction of an apparatus for time-resolved tunable diode laser absorption spectroscopy (LAS) for the diagnostics of pulsed plasma. A detailed description of the extension of a progressive method of laser absorption spectroscopy in continuous regime to a direct triggering method of the time-resolved laser absorption spectroscopy (TR-LAS) is presented. The main advantage of the developed method is its capability to measure the time evolution of the whole absorption profile with a preset time resolution, which can be less than 1 mu s. Therefore, the presented method of repetitive sampling applied on LAS in plasma processes is capable of simultaneous measurement of the density and kinetic temperature of selected particles. Its appropriate applications are to periodical processes in technological plasma, namely pulsed plasma discharges. The developed method of TR-LAS was applied to measurements of the temporal evolution of density and kinetic temperature of argon metastable species during high-power impulse magnetron sputtering of titanium and titanium dioxide thin films. . Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2018
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