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PEC reliability in 3D e-beam DOE nanopatterning
- 1.Kolařík, V., Krátký, S., Urbánek, M. PEC reliability in 3D e-beam DOE nanopatterning. In: 9th International Conference on Charged Particle Optics. Book of Abstracts. Brno: Institute of Scientific Instruments AS CR, v. v. i, 2014, s. 37. ISBN 978-80-87441-11-4.
Number of the records: 1