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Characterization of microwave surface wave plasma in linear configuration and growth of nano-sized carbon allotropes
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SYSNO ASEP 0424263 Document Type A - Abstract R&D Document Type The record was not marked in the RIV R&D Document Type Není vybrán druh dokumentu Title Characterization of microwave surface wave plasma in linear configuration and growth of nano-sized carbon allotropes Author(s) Potocký, Štěpán (FZU-D) RID, ORCID
Čada, Martin (FZU-D) RID, ORCID, SAI
Babchenko, Oleg (FZU-D) RID, ORCID
Ižák, Tibor (FZU-D) RID
Davydova, Marina (FZU-D) RID, ORCID
Rezek, Bohuslav (FZU-D) RID, ORCID
Kromka, Alexander (FZU-D) RID, ORCID, SAISource Title 537. WE Heraeus Seminar. Physics of Ionized and Ion-Assisted PVD: Principles and Current Trends. - Dresden : Wilhelm und Else Heraeus-Stiftung, 2013 / Gemming S. ; Abrasonis G. ; Vinnichenko M.
S. 75-76Number of pages 2 s. Action WE-Heraeus-Seminar /537./ - Physics of Ionized and Ion-Assisted PVD: Principles and Current Trends Event date 26.06.2013-28.06.2013 VEvent location Dresden Country DE - Germany Event type WRD Language eng - English Country DE - Germany Keywords microwave plasma ; CVD deposition Subject RIV BL - Plasma and Gas Discharge Physics R&D Projects TA01011740 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) LM2011026 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GAP205/12/0908 GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 Annotation Recently design and optimization of the microwave plasma CVD techniques has reached matured state. Design and optimization of microwave plasma reactors is dominated by high pressure systems (10 to 100kPa). Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2014
Number of the records: 1