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Mechanical and electrical properties of microcrystalline silicon thin films
SYS 0375338 LBL 01990^^^^^2200325^^^450 005 20240103200716.2 100 $a 20120309d m y slo 03 ba 101 0-
$a eng 102 $a CZ 200 1-
$a Mechanical and electrical properties of microcrystalline silicon thin films 210 $a Praha $c Univerzita Karlova $d 2010 215 $a 86 s. 610 0-
$a conductive atomic force microscopy 610 0-
$a raman micro-spectroscopy 610 0-
$a microcrystalline silicon 700 -1
$3 cav_un_auth*0240734 $i Tenké vrstvy a nanostruktury $j Thin Films and Nanostructures $w Thin Films and Nanostructures $4 070 $a Vetushka $b Aliaksi $p FZU-D $T Fyzikální ústav AV ČR, v. v. i. 856 $u http://dl.dropbox.com/u/26071625/AV_PhD.pdf
Number of the records: 1