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INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC
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SYSNO ASEP 0368755 Document Type C - Proceedings Paper (int. conf.) R&D Document Type The record was not marked in the RIV Title INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC Author(s) Muresan, M. (CZ)
Zajíčková, L. (CZ)
Buršíková, V. (CZ)
Franta, D. (CZ)
Nečas, D. (CZ)
Peřina, Vratislav (UJF-V) RID
Mikšová, Romana (UJF-V) RID, ORCID, SAISource Title 12th International Balkan Workshop on Applied Physics. - Constanta : Ovidius University of Constanta, 2011 Pages s. 4299-4308 Number of pages 10 s. Action 12th International Balkan Workshop on Applied Physics Event date 06.07.2011-08.07.2011 VEvent location Constnta Country RO - Romania Event type WRD Language eng - English Country RO - Romania Keywords Diamond-like carbon ; Amorphous hydrogenated carbon ; Optical properties Subject RIV BL - Plasma and Gas Discharge Physics R&D Projects GA104/09/1269 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10480505 - UJF-V (2005-2011) Annotation Interesting properties of diamond-like carbon (DLC) coatings such as high hardness, low friction coefficient, high thermal conductivity and wide band gaps have increased the number of industrial partners to research ways of producing DLC layers with chemical inertness, high gas barrier properties and high biocompatibility. The aim of the experiments was to characterize and compare the properties of diamond-like carbon films prepared from different mixtures such as CH4/H2, CH4/H2/N2 and CH4/Ar from a radiofrequency capacitively-coupled discharge at 13.56 MHz. Parameters like concentration, pressure, power and time were changed to vary film properties. The films were optically characterized by UV-VIS reflectometry, ellipsometry. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2012
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