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INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC

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    SYSNO ASEP0368755
    Document TypeC - Proceedings Paper (int. conf.)
    R&D Document TypeThe record was not marked in the RIV
    TitleINFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC
    Author(s) Muresan, M. (CZ)
    Zajíčková, L. (CZ)
    Buršíková, V. (CZ)
    Franta, D. (CZ)
    Nečas, D. (CZ)
    Peřina, Vratislav (UJF-V) RID
    Mikšová, Romana (UJF-V) RID, ORCID, SAI
    Source Title12th International Balkan Workshop on Applied Physics. - Constanta : Ovidius University of Constanta, 2011
    Pagess. 4299-4308
    Number of pages10 s.
    Action12th International Balkan Workshop on Applied Physics
    Event date06.07.2011-08.07.2011
    VEvent locationConstnta
    CountryRO - Romania
    Event typeWRD
    Languageeng - English
    CountryRO - Romania
    KeywordsDiamond-like carbon ; Amorphous hydrogenated carbon ; Optical properties
    Subject RIVBL - Plasma and Gas Discharge Physics
    R&D ProjectsGA104/09/1269 GA ČR - Czech Science Foundation (CSF)
    CEZAV0Z10480505 - UJF-V (2005-2011)
    AnnotationInteresting properties of diamond-like carbon (DLC) coatings such as high hardness, low friction coefficient, high thermal conductivity and wide band gaps have increased the number of industrial partners to research ways of producing DLC layers with chemical inertness, high gas barrier properties and high biocompatibility. The aim of the experiments was to characterize and compare the properties of diamond-like carbon films prepared from different mixtures such as CH4/H2, CH4/H2/N2 and CH4/Ar from a radiofrequency capacitively-coupled discharge at 13.56 MHz. Parameters like concentration, pressure, power and time were changed to vary film properties. The films were optically characterized by UV-VIS reflectometry, ellipsometry.
    WorkplaceNuclear Physics Institute
    ContactMarkéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228
    Year of Publishing2012
Number of the records: 1  

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