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INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC

  1. 1.
    MURESAN, M., ZAJÍČKOVÁ, L., BURŠÍKOVÁ, V., FRANTA, D., NEČAS, D., PEŘINA, V., MIKŠOVÁ, R. INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC. In: 12th International Balkan Workshop on Applied Physics. Constanta: Ovidius University of Constanta, 2011, s. 4299-4308.
Number of the records: 1  

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