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Comparative study of total power density at a substrate in pulsed DC magnetron and hollow-cathode plasma jet sputtering systems
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SYSNO 0335019 Title Comparative study of total power density at a substrate in pulsed DC magnetron and hollow-cathode plasma jet sputtering systems Title Porovnávací studie celkové výkonové hustoty na substrát v pulzním DC magnetronovém výboji a v plazma-jetu s dutou katodou Author(s) Čada, Martin (FZU-D) RID, ORCID, SAI
Virostko, Petr (FZU-D)
Kment, Štěpán (FZU-D) RID, ORCID
Hubička, Zdeněk (FZU-D) RID, ORCID, SAISource Title Plasma Processes and Polymers. Roč. 6, S1 (2009), S247-S252. - : Wiley Conference International Conference on Plasma Surface Engineering /11./, Garmisch Partenkirchen, 15.09.2008-19.09.2008 Document Type Článek v odborném periodiku Grant KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) KJB100100707 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) KJB100100805 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) 1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic CEZ AV0Z10100522 - FZU-D (2005-2011) Language eng Country DE Keywords calorimeter probe * floating substrate * magnetron * plasma jet * pulsed discharge Permanent Link http://hdl.handle.net/11104/0179607
Number of the records: 1