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Deposition of Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. thin films by double RF hollow cathode plasma jet system

  1. 1.
    Hubička, Z., Virostko, P., Olejníček, J., Deyneka, A., Adámek, P., Valvoda, V., Jastrabík, L., Šícha, M., Tichý, M. Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system. In: SCHMIDT, J., ŠIMEK, M., PEKÁREK, S., PRUKNER, V., eds. International conference on phenomena in ionized gases- ICPIG /28./. Praha: Institute of Plasma Physics AS CR, 2007, s. 765-768. ISBN 978-80-87026-01-4.
Number of the records: 1  

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