Computer Controlled Low Energy SEM

0205641 - UPT-D 20030023 RIV US eng J - Journal Article
Mika, Filip - Ryšávka, J. - Lopour, F. - Zadražil, M. - Müllerová, Ilona - Frank, Luděk
Computer Controlled Low Energy SEM.
Microscopy and Microanalysis. Roč. 9, Sup. 3 (2003), s. 116 - 117. ISSN 1431-9276. E-ISSN 1435-8115.
[MC 2003. Dresden, 07.09.2003-12.09.2003]
R&D Projects: GA AV ČR IBS2065017
Institutional research plan: CEZ:AV0Z2065902
Keywords : low energy SEM * scanning electron microscope * non-conductive specimens
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 1.648, year: 2003

In the last two decades the low energy range is employed in the SEM operation for many reasons that include reduced charging of non-conductive specimens, better visualisation of surface relief, larger emitted signals and, at very low energies below 100 eV, new families of image contrasts. While energy around 1 keV is available in SEM of conventional design, extension down to about 200 eV is possible by using a compound objective lens with a retarding field element and very low energies require applying the retarding field directly to the specimen surface in so-called cathode lens [1 to 4]. The cathode lens can be inserted to below the standard objective lens of SEM [3] and most efficient is to use a coaxially positioned single-crystal scintillator disc with small central hole, serving as the anode and detector simultaneously [5]. In this configuration, an arbitrary low impact energy of primary electrons is adjusted by high negative biasing of the specimen.
Permanent Link: http://hdl.handle.net/11104/0101254