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Advances in SEM Instrumentation
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SYSNO ASEP 0205403 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Advances in SEM Instrumentation Author(s) Frank, Luděk (UPT-D) RID, SAI, ORCID
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDSource Title Proceedings of 5th Multinational Congress on Electron Microscopy / Dini L. ; Catalano M.. - Lecce : Rinton Press, 2001 - ISBN 1-58949-003-7 Pages s. 503-514 Number of pages 12 s. Action MCEM '01 /5./ - Multinational Congress on Electron Microscopy Event date 20.09.2001-25.09.2001 VEvent location Lecce Country IT - Italy Event type WRD Language eng - English Country IT - Italy Keywords Termoemission (TE) cathode ; permanent magnet lenses Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects GA202/99/0008 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z2065902 - UPT-D Annotation The classical Scanning Electron Microscope seems to have achieved its limits behind which, at least for a near future, hardly any space is available for further improvements. "Classical" means here a microscope with the thermoemission (TE) cathode and constant energy of the primary electron beam throughout the column, adjustable within the range of 1 to 30 keV. CAD tools enabled the manufacrurers to upgrade to resolution to 3 or 3.5 nm at 25 or 30keV, which is not likely to be significantly updated within the conception mentioned. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2002
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