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Imaging of Specimens at Optimized Low and Very Low Energies in Scanning Electron Microscopes
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SYSNO ASEP 0205378 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Imaging of Specimens at Optimized Low and Very Low Energies in Scanning Electron Microscopes Author(s) Müllerová, Ilona (UPT-D) RID, SAI, ORCID Source Title Scanning - ISSN 0161-0457
Roč. 23, č. 6 (2001), s. 379-394Number of pages 16 s. Language eng - English Country US - United States Keywords contrast mechanisms ; low electron energies ; scanning electron microscope Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects IAA1065901 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z2065902 - UPT-D Annotation The modern trend towards low electron energies in scanning electron microscopy (SEM), characterised by lowering the acceleration voltages in low-voltage SEM (LVSEM) or by utilising a retarding-field optical element in low-energy SEM (LESEM), makes the energy range where new contrasts appear accessible. This range is further extended by a scanning low-energy electron microscope (SLEEM) fitted with a cathode lens that achieves nearly constant spatial resolution throughout the energy scale. This enables one to optimise freely the electron beam energy according to the given task. At low energies, there exist classes of image contrast that make particular specimen data visible most effectively or even exclusively within certain energy intervals or at certain energy values. Some contrasts are well understood and can presently be utilised for practical surface examinations, but others have not yet been reliably explained and therefore supplementary experiments are needed. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2002
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