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Mechanism of the film composition formation during magnetron sputtering of WTi

    1.
    SYSNO0185385
    TitleMechanism of the film composition formation during magnetron sputtering of WTi
    Author(s) Shaginyan, L. R. (UA)
    Mišina, M. (CZ)
    Kadlec, S. (CZ)
    Jastrabík, L. (CZ)
    Macková, Anna (UJF-V) RID, ORCID, SAI
    Peřina, Vratislav (UJF-V) RID
    Source Title Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films. Roč. 19, č. 5 (2001), s. 2554-2566. - : AIP Publishing
    Document TypeČlánek v odborném periodiku
    Grant GV202/97/K038 GA ČR - Czech Science Foundation (CSF)
    KSK1010104 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    Languageeng
    CountryUS
    Permanent Linkhttp://hdl.handle.net/11104/0081781
     

Number of the records: 1  

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