Number of the records: 1
Mechanism of the film composition formation during magnetron sputtering of WTi
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$a Mechanism of the film composition formation during magnetron sputtering of WTi 215 $a 13 s. 463 -1
$1 001 cav_un_epca*0257155 $1 011 $a 0734-2101 $e 1520-8559 $1 200 1 $a Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films $v Roč. 19, č. 5 (2001), s. 2554-2566 $1 210 $c AIP Publishing 700 -1
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Number of the records: 1