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Mechanism of the film composition formation during magnetron sputtering of WTi
- 1.Shaginyan, L. R., Mišina, M., Kadlec, S., Jastrabík, L., Macková, A., Peřina, V. Mechanism of the film composition formation during magnetron sputtering of WTi. Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films. 2001, 19(5), 2554-2566. ISSN 0734-2101. E-ISSN 1520-8559.
Number of the records: 1