Number of the records: 1  

Mechanism of the film composition formation during magnetron sputtering of WTi

  1. 1.
    SHAGINYAN, L. R., MIŠINA, M., KADLEC, S., JASTRABÍK, L., MACKOVÁ, A., PEŘINA, V. Mechanism of the film composition formation during magnetron sputtering of WTi. Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films. 2001, 19(5), 2554-2566. ISSN 0734-2101. E-ISSN 1520-8559.

Number of the records: 1  

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