Investigation of RF and DC plasma jet system during deposition of highly oriented ZnO thin films

Number of the records: 1

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SYSNO	0134425
Title	Investigation of RF and DC plasma jet system during deposition of highly oriented ZnO thin films
Author(s)	Čada, Martin (FZU-D)_{RID, ORCID, SAI} Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI} Adámek, P. (CZ) Ptáček, Pavel (FZU-D) Šíchová, Hana (FZU-D) Šícha, Miloš (FZU-D) Jastrabík, Lubomír (FZU-D)_{RID, ORCID}
Source Title	Surface and Coatings Technology. 174-175, - (2003), s. 627-631. - : Elsevier
Document Type	Článek v odborném periodiku
Grant	GP202/02/P021 GA ČR - Czech Science Foundation (CSF)
	GA202/00/1592 GA ČR - Czech Science Foundation (CSF)
	LN00A015 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	ME 441 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
CEZ	AV0Z1010914 - FZU-D
Language	eng
Country	NL
Keywords	plasma jet * ZnO thin films * Langmuir probe
Permanent Link	http://hdl.handle.net/11104/0032328

Number of the records: 1