Electron optical properties of a new low-energy scanning electron microscope with beam separator

Number of the records: 1

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SYSNO	0494372
Title	Electron optical properties of a new low-energy scanning electron microscope with beam separator
Author(s)	Radlička, Tomáš (UPT-D)_{RID, ORCID, SAI} Kolařík, V. (CZ) Oral, Martin (UPT-D)_{RID, ORCID, SAI}
Corespondence/senior	Radlička, Tomáš - Korespondující autor
Source Title	Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar. S. 64-65. - Brno : Institute of Scientific Instruments The Czech Academy of Sciences, 2018
Conference	Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, 04.06.2018 - 08.06.2018, Skalský dvůr
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	UPT-D - RVO:68081731
Language	eng
Country	CZ
Keywords	low energy scanning electron microscopy * beam separation * aberrations
Permanent Link	http://hdl.handle.net/11104/0287628

Number of the records: 1