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Electron optical properties of a new low-energy scanning electron microscope with beam separator
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SYSNO ASEP 0494372 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Electron optical properties of a new low-energy scanning electron microscope with beam separator Author(s) Radlička, Tomáš (UPT-D) RID, ORCID, SAI
Kolařík, V. (CZ)
Oral, Martin (UPT-D) RID, ORCID, SAINumber of authors 3 Source Title Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar. - Brno : Institute of Scientific Instruments The Czech Academy of Sciences, 2018 - ISBN 978-80-87441-23-7 Pages s. 64-65 Number of pages 2 s. Publication form Print - P Action Recent Trends in Charged Particle Optics and Surface Physics Instrumentation Event date 04.06.2018 - 08.06.2018 VEvent location Skalský dvůr Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords low energy scanning electron microscopy ; beam separation ; aberrations Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Electrical and electronic engineering R&D Projects LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 UT WOS 000450591400024 Annotation The low energy scanning electron microscope (SEM) which is currently at the Institute of
Scientific Instruments, suffers from low resolution and suboptimal detections systems. In the cathode lens regime, signal electrons are accelerated by the electric field between the sample and the objective lens, getting collimated. Those with low emission angles get through the bore in the BSE detector into the objective lens and cannot be detected by the available detectors now. The information about the sample provided by these electrons is lost, which limits our microscopy methods.
These two limitations are to be overcome with a new low-energy SEM, which was developed
at Delong Instruments. It consists of a field emission gun with the energy width of 0.8 eV, a magnetic condenser lens, and an electrostatic triode objective lens. The acceleration voltage is 5 kV. The sample stage can be biased at up to -5 kV to provide low landing energy without strong decrease of the resolution – the effect of the cathode lens. A beam separator is placed in front of the deflection system for the detection of the signal electrons that get to the column. In a combination with standard detectors and cathode lens, it allows detecting all
kinds of signal electrons.Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2019
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