Quantitative comparison of simulated and measured signals in the STEM mode of a SEM

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SYSNO	0489596
Title	Quantitative comparison of simulated and measured signals in the STEM mode of a SEM
Author(s)	Walker, Christopher (UPT-D)_RID Konvalina, Ivo (UPT-D)_{RID, ORCID, SAI} Mika, Filip (UPT-D)_{RID, SAI, ORCID} Frank, Luděk (UPT-D)_{RID, SAI, ORCID} Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID}
Corespondence/senior	Walker, Christopher - Korespondující autor
Source Title	Nuclear Instruments & Methods in Physics Research Section B. Roč. 415, JAN (2018), s. 17-24. - : Elsevier
Document Type	Článek v odborném periodiku
Grant	TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR), CZ - Czech Republic
	LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	606988, XE - EU countries
Institutional support	UPT-D - RVO:68081731
Language	eng
Country	NL
Keywords	low-energy electrons * multiple scattering * elastic-scattering * transmission
Permanent Link	http://hdl.handle.net/11104/0283980

Number of the records: 1