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Quantitative comparison of simulated and measured signals in the STEM mode of a SEM
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SYSNO ASEP 0489596 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Quantitative comparison of simulated and measured signals in the STEM mode of a SEM Author(s) Walker, Christopher (UPT-D) RID
Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Mika, Filip (UPT-D) RID, SAI, ORCID
Frank, Luděk (UPT-D) RID, SAI, ORCID
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDNumber of authors 5 Source Title Nuclear Instruments & Methods in Physics Research Section B. - : Elsevier - ISSN 0168-583X
Roč. 415, JAN (2018), s. 17-24Number of pages 8 s. Publication form Print - P Language eng - English Country NL - Netherlands Keywords low-energy electrons ; multiple scattering ; elastic-scattering ; transmission Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Coating and films R&D Projects TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 UT WOS 000424309000003 EID SCOPUS 85033458029 DOI 10.1016/j.nimb.2017.10.034 Annotation The transmission of electrons with energies 15 keV and 30 keV through Si and Au films of 100 nm thickness each have been studied in a Scanning Transmission Electron Microscope. The electrons that were transmitted through the films were detected using a multi-annular photo-detector consisting of a central Bright Field (BF) and several Dark Field (DF) detectors. For the experiment the detector was gradually offset from the axis and the signal from the central BF detector was studied as a function of the offset distance and compared with MC simulations. The experiment showed better agreement between experiment and several different MC simulations as compared to previous results, but differences were still found particularly for low angle scattering from Si. Data from Au suggest that high energy secondary electrons contribute to the signal on the central BF detector for low primary beam energies, when the STEM detector is in its usual central position. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2019
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