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Recent Progress in Ion Beam Fabrication of Integrated Optical Elements
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SYSNO ASEP 0488748 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Recent Progress in Ion Beam Fabrication of Integrated Optical Elements Author(s) Banyasz, I. (HU)
Nagy, G. U. L. (HU)
Havránek, Vladimír (UJF-V) RID, SAI, ORCID
Voseček, Václav (UJF-V) RID
Agocs, E. (HU)
Fried, M. (DE)
Rakovics, V. (HU)
Pelli, S. (IT)Number of authors 8 Article number 17154794 Source Title International Conference on Transparent Optical Networks-ICTON, 19th International Conference on Transparent Optical Networks-ICTON. - New York : IEEE, 2017 - ISSN 2162-7339 - ISBN 978-1-5386-0859-3 Number of pages 4 s. Publication form Print - P Action 19th International Conference on Transparent Optical Networks (ICTON) Event date 02.07.2017 - 06.07.2017 VEvent location Girona Country ES - Spain Event type WRD Language eng - English Country US - United States Keywords integrated optics ; planar optical waveguide ; optical Bragg grating Subject RIV BH - Optics, Masers, Lasers OECD category Optics (including laser optics and quantum optics) R&D Projects LM2015056 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UJF-V - RVO:61389005 UT WOS 000427031500146 EID SCOPUS 85031047987 DOI 10.1109/ICTON.2017.8024871 Annotation Planar optical waveguides and Bragg gratings were designed and written in various optical crystals with medium energy ion implantation. Some examples of the fabricated integrated optical elements are presented in this article: Planar optical waveguides fabricated in Er: LiNbO3 crystal by irradiation with 5 MeV N3+ ions, and Bragg gratings fabricated by multi-energy implantation into a silicon substrate with N+ ions in the 800 keV - 3.5 MeV energy range. The SRIM code was used for planning the optical elements. The ion implanted optical elements were tested by spectroscopic ellipsometry and visible and infrared reflectometry. The results show that the proposed fabrication methods can produce integrated optical elements of adequate parameters. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2018
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