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Soft x-ray laser ablation mass spectrometry for materials study and nanoscale chemical imaging
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SYSNO ASEP 0487367 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Soft x-ray laser ablation mass spectrometry for materials study and nanoscale chemical imaging Author(s) Kuznetsov, I. (US)
Burian, Tomáš (FZU-D) RID, ORCID
Juha, Libor (FZU-D) RID, ORCID, SAI
Soufli, R. (US)
Filevich, J. (US)
Woolston, M. (US)
Bernstein, E.R. (US)
Crick, D.C. (US)
Carlton, D. (US)
Chao, W. (US)
Anderson, E.H. (US)
Rocca, J.J. (US)
Menoni, C.S. (US)Number of authors 13 Article number 958905 Source Title X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI. - Bellingham : SPIE, 2015 / Menoni C.S. ; Klisnick A. - ISSN 0277-786X - ISBN 978-1-62841-755-5 Pages s. 1-9 Number of pages 9 s. Publication form Print - P Action X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI Event date 12.08.2015 - 13.08.2015 VEvent location San Diego Country US - United States Event type WRD Language eng - English Country US - United States Keywords mass spectrometry ; laser ablation ; compositional imaging ; soft x-ray lasers ; soft x-ray multilayer optics Subject RIV BL - Plasma and Gas Discharge Physics OECD category Fluids and plasma physics (including surface physics) R&D Projects GAP108/11/1312 GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 UT WOS 000366306800005 EID SCOPUS 84950335502 DOI 10.1117/12.2188645 Annotation There are significant advantages for using a compact capillary discharge soft x-ray laser (SXRL) with wavelength of 46.9 nm for mass spectrometry applications. The 26.4 eV energy photons provide efficient single-photon ionization while preserving the structure of molecules and clusters. The tens of nanometers absorption depth of the radiation coupled with the focusing of the laser beam to diameter of ∼100 nm result in the ablation of atto-liter scale craters which in turn enable high resolution mass spectral imaging of solid samples. In this paper we describe results on the analysis of composition depth-profiling of multilayer oxide stack and material studies in photoresists, ionic crystals, and magnesium corrosion products using SXRL ablation mass spectrometry, a method first demonstrated by our group. These materials are used in a variety of soft x-ray applications such as detectors, multilayer optics, and many more.
Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2018
Number of the records: 1