Reaction of PFCs in water stabilized plasma

0487183 - ÚFP 2018 SK eng A - Abstract
Mastný, L. - Horníček, J. - Živný, Oldřich - Brožek, Vlastimil - Sember, Viktor
Reaction of PFCs in water stabilized plasma.
ChemZi. Roč. 13, č. 1 (2017), s. 161. ISSN 1336-7242.
[Zjazd chemikov /69./. 11.09.2017-15.09.2017, Horný Smokovec]
R&D Projects: GA ČR(CZ) GC17-10246J
Institutional support: RVO:61389021
Keywords : Water stabilized plasma * tetrafluoromethane * corrosion resistance * boron nitride * titanium nitride
OECD category: Fluids and plasma physics (including surface physics)

In order to investigate plasma abatement of highly stable fluoro- and chlorocarbons using steam plasma generated by water stabilized DC-plasma torch equilibrium composition and thermodynamic properties of the system formed by decomposition products were calculated. The first step of the joined bilateral project solved by Institute of plasma Physics of the CAS and NTU and INER at Taiwan is the investigation of the processes CF4 + 2 H2O = CO2 + 4 HF, which efficient at temperatures above 4000 %C. For such the reaction course the modification of the plasma chemical reactor are required in order to be sufficiently resistant to the produced hydrogenfluoride. Therefore, corrosion resistance of the materials made from boron nitride and titanium nitride was investigated. Both the materials are mechanically and chemically stable up to 3000 °°C. These materials were selected because of the plasma generator itself produces nitrogen oxides which, after reaction with water, give rise to acid environment to which these materials exhibit high corrosion resistance. The samples of BN and TiN has been prepared by Spark plasma sintering method. The reactivity of the TiN samples was compared to the corresponding thin films prepared by magnetron sputtering method
Permanent Link: http://hdl.handle.net/11104/0281867